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12. The Production and Transmission of High Purity Gases for the Semiconductor Industry / R. Galbraith -- 13. Materials for Services Pipework / T. Hodgkiess.
Design of Clean Rooms
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Environmental Control, Design of Clean Rooms
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Clean Room Design
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This practical book provides detailed guidance on all aspects of clean room airflow, the mechanics of airflow, and how microbial contamination is carried. Ljung
HVAC DESIGN FOR CLEAN ROOMS
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Authors: Charles Nehme
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Preface Welcome to the world of cleanrooms, where precision, purity, and innovation converge to shape the cutting edge of technology and scientific advancements