Dry Etching For Microelectronics
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Language: en
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Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier
This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V comp
Language: en
Pages: 299
Pages: 299
Type: BOOK - Published: 1984 - Publisher:
Language: en
Pages: 247
Pages: 247
Type: BOOK - Published: 2013-06-29 - Publisher: Springer Science & Business Media
This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each
Language: en
Pages: 126
Pages: 126
Type: BOOK - Published: 2014-10-25 - Publisher: Springer
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat
Language: en
Pages: 452
Pages: 452
Type: BOOK - Published: 1993 - Publisher: The Electrochemical Society