High Density Plasma Sources
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Type: BOOK - Published: 1996-12-31 - Publisher: Elsevier
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,
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This book presents a comprehensive description of the most promising high density plasma sources operated at low and intermediate pressures which are used, or c
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Type: BOOK - Published: 2013-10-22 - Publisher: Academic Press
This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, elec
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