Ion Implantation
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Language: en
Pages: 271
Pages: 271
Type: BOOK - Published: 2007-05-16 - Publisher: Springer Science & Business Media
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c
Language: en
Pages: 400
Pages: 400
Type: BOOK - Published: 2013-11-27 - Publisher: Springer Science & Business Media
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo
Language: en
Pages: 649
Pages: 649
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T
Language: en
Pages: 572
Pages: 572
Type: BOOK - Published: 1996-03-29 - Publisher: Cambridge University Press
Comprehensive guide to an important materials science technique for students and researchers.
Language: en
Pages: 1031
Pages: 1031
Type: BOOK - Published: 1995-05-16 - Publisher: Newnes
The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas