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Introductory MEMS
Language: en
Pages: 444
Authors: Thomas M. Adams
Categories: Technology & Engineering
Type: BOOK - Published: 2008-11-01 - Publisher: Springer

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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the stud
Analysis and Design Principles of MEMS Devices
Language: en
Pages: 327
Authors: Minhang Bao
Categories: Technology & Engineering
Type: BOOK - Published: 2005-04-12 - Publisher: Elsevier

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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro
RF MEMS
Language: en
Pages: 512
Authors: Gabriel M. Rebeiz
Categories: Technology & Engineering
Type: BOOK - Published: 2004-02-06 - Publisher: John Wiley & Sons

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Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power c
Handbook of Silicon Based MEMS Materials and Technologies
Language: en
Pages: 670
Authors: Markku Tilli
Categories: Technology & Engineering
Type: BOOK - Published: 2009-12-08 - Publisher: Elsevier

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applica
Fundamentals of Microelectromechanical Systems (MEMS)
Language: en
Pages: 415
Authors: Eun Sok Kim
Categories: Technology & Engineering
Type: BOOK - Published: 2021-05-14 - Publisher: McGraw Hill Professional

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A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge mi