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Containing 42 invited papers, this fine book covers a broad range of subjects on plasmas and applications. In the first section, plasma properties and methods u
Plasma Sources for Thin Film Deposition and Etching
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This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, elec
Plasma Deposition, Treatment, and Etching of Polymers
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Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the i
Handbook of Plasma Processing Technology
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Plasma Processing
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Authors: R. G. Frieser
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