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Rapid Thermal and Other Short-time Processing Technologies III
Language: en
Pages: 500
Authors: Paul J. Timans
Categories: Technology & Engineering
Type: BOOK - Published: 2002 - Publisher: The Electrochemical Society

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Rapid Thermal and Other Short-time Processing Technologies II
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"Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Rapid Thermal and Other Short-time Processing Technologies
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Authors: Fred Roozeboom
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The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issu
Advanced Short-time Thermal Processing for Si-based CMOS Devices 2
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Ion Beams in Materials Processing and Analysis
Language: en
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Authors: Bernd Schmidt
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A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of