Silicon Nitride For Microelectronic Applications
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Language: en
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Type: BOOK - Published: 2013-03-14 - Publisher: Springer Science & Business Media
The large amount of literature on the technology of thin film silicon nitride indi cates the interest of the Department of Defense, NASA and the semiconductor i
Language: en
Pages: 124
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Type: BOOK - Published: 2013-03-14 - Publisher: Springer Science & Business Media
This survey is concerned with the use of silicon nitride in the semi conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3,
Language: en
Pages: 118
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Language: en
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Language: en
Pages: 401
Pages: 401
Type: BOOK - Published: - Publisher:
This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula S