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An Introduction to Microelectromechanical Systems Engineering
Language: en
Pages: 312
Authors: Nadim Maluf
Categories: Technology & Engineering
Type: BOOK - Published: 2004 - Publisher: Artech House

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Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Syste
Micro Electro Mechanical System Design
Language: en
Pages: 492
Authors: James J. Allen
Categories: Technology & Engineering
Type: BOOK - Published: 2005-07-08 - Publisher: CRC Press

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It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) d
Principles of Microelectromechanical Systems
Language: en
Pages: 552
Authors: Ki Bang Lee
Categories: Technology & Engineering
Type: BOOK - Published: 2011-03-21 - Publisher: John Wiley & Sons

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The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found i
Introduction to Microelectromechanical Microwave Systems
Language: en
Pages: 242
Authors: Héctor J. de los Santos
Categories: Science
Type: BOOK - Published: 2004 - Publisher: Artech House

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Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wir
Dynamics of Microelectromechanical Systems
Language: en
Pages: 411
Authors: Nicolae Lobontiu
Categories: Technology & Engineering
Type: BOOK - Published: 2014-07-08 - Publisher: Springer Science & Business Media

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Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous