Experimental Demonstration Of A Prototype Maskless Micro Ion Beam Reduction Lithography System

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Experimental Demonstration of a Prototype Maskless Micro-ion-beam Reduction Lithography System

Author	: Vinh Van Ngo
Publisher	:
Total Pages	: 412
Release	: 2004
ISBN-10	: UCAL:C3497364
ISBN-13	:
Rating	: 4/5 (64 Downloads)

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Book Synopsis Experimental Demonstration of a Prototype Maskless Micro-ion-beam Reduction Lithography System by : Vinh Van Ngo

Download or read book Experimental Demonstration of a Prototype Maskless Micro-ion-beam Reduction Lithography System written by Vinh Van Ngo and published by . This book was released on 2004 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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A proof-of-principle ion projection lithography (IPL) system called Maskless Micro-ion beam Reduction Lithography (MMRL) has been developed and tested at the La

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A maskless micro-ion-beam reduction lithography system is a system for projecting patterns onto a resist layer on a wafer with feature size down to below 100 nm

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In order to provide an economical lithography approach for low to medium volume advanced IC fabrication, a maskless ion beam lithography method, called Maskless