Materials And Failures In Mems And Nems
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Language: en
Pages: 435
Pages: 435
Type: BOOK - Published: 2015-09-11 - Publisher: John Wiley & Sons
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the
Language: en
Pages: 1028
Pages: 1028
Type: BOOK - Published: 2020-04-17 - Publisher: Elsevier
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a part
Language: en
Pages: 312
Pages: 312
Type: BOOK - Published: 2021-10-12 - Publisher: Springer Nature
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
Language: en
Pages: 461
Pages: 461
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press
The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every
Language: en
Pages: 300
Pages: 300
Type: BOOK - Published: 2010-11-02 - Publisher: Springer Science & Business Media
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Com