Micro And Nano Fabrication
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Language: en
Pages: 537
Pages: 537
Type: BOOK - Published: 2015-01-02 - Publisher: Springer
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book prov
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 2018-07-16 - Publisher: Springer
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary te
Language: en
Pages: 404
Pages: 404
Type: BOOK - Published: 2021-10-01 - Publisher: Springer Nature
This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The conte
Language: en
Pages: 239
Pages: 239
Type: BOOK - Published: 2022-06-13 - Publisher: CRC Press
In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other
Language: en
Pages: 708
Pages: 708
Type: BOOK - Published: 2007-06-19 - Publisher: Springer Science & Business Media
This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabricat