Related Books

Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Etching
Language: en
Pages: 40
Authors: Matthew Cheuk-Woh Tom
Categories:
Type: BOOK - Published: 2022 - Publisher:

DOWNLOAD EBOOK

In recent years, increasing demand for microchips have been fueled by the rise of nano scale technologies that are difficult to fabricate. Atomic layer etching
Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition
Language: en
Pages: 151
Authors: Yichi Zhang
Categories:
Type: BOOK - Published: 2021 - Publisher:

DOWNLOAD EBOOK

Facilitated by the increasing importance and demand of semiconductors for the smartphoneand even the automobile industry, thermal atomic layer deposition (ALD)
Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Deposition with Application to Chamber Design
Language: en
Pages: 60
Authors: Yichi Zhang
Categories:
Type: BOOK - Published: 2019 - Publisher:

DOWNLOAD EBOOK

This work develops a first-principles-based three-dimensional, multiscale computational fluid dynamics (CFD) model, together with reactor geometry optimizations
Microscopic Modeling, Machine Learning-Based Modeling and Optimal Operation of Thermal and Plasma Atomic Layer Deposition
Language: en
Pages: 162
Authors: Yangyao Ding
Categories:
Type: BOOK - Published: 2021 - Publisher:

DOWNLOAD EBOOK

Atomic layer deposition (ALD) and plasma enhanced atomic layer deposition (PEALD) are the most widely utilized deposition techniques in the semiconductor indust
Applications of Computational Fluid Dynamics Simulation and Modeling
Language: en
Pages: 240
Authors: Suvanjan Bhattacharyya
Categories: Science
Type: BOOK - Published: 2022-10-26 - Publisher: BoD – Books on Demand

DOWNLOAD EBOOK

This book provides well-balanced coverage of computational fluid dynamics analysis for thermal and flow characteristics of various thermal and flow systems. It