Download or read book Particle Control for Semiconductor Manufacturing written by Donovan and published by Routledge. This book was released on 2018-05-04 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In