Plasma Sources For Thin Film Deposition And Etching
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Type: BOOK - Published: 1994-08-18 - Publisher: Academic Press
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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,
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Type: BOOK - Published: 1996-12-31 - Publisher: Elsevier
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,
Language: en
Pages: 749
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Type: BOOK - Published: 1993-10-28 - Publisher: Trans Tech Publications Ltd
Containing 42 invited papers, this fine book covers a broad range of subjects on plasmas and applications. In the first section, plasma properties and methods u