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Plasma Sources for Thin Film Deposition and Etching
Language: en
Pages: 343
Authors: Maurice H. Francombe
Categories: Technology & Engineering
Type: BOOK - Published: 2013-10-22 - Publisher: Academic Press

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This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, elec
Plasma Sources for Thin Film Deposition and Etching
Language: en
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Type: BOOK - Published: 1994-08-18 - Publisher: Academic Press

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This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, elec
High Density Plasma Sources
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Authors: Oleg A. Popov
Categories: Electronic books
Type: BOOK - Published: 1995 - Publisher:

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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,
High Density Plasma Sources
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Pages: 467
Authors: Oleg A. Popov
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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,
Plasma Properties, Deposition and Etching
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Categories: Technology & Engineering
Type: BOOK - Published: 1993-10-28 - Publisher: Trans Tech Publications Ltd

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Containing 42 invited papers, this fine book covers a broad range of subjects on plasmas and applications. In the first section, plasma properties and methods u