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Ion Implantation Techniques
Language: en
Pages: 377
Authors: H. Ryssel
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the appli
SRIM, the Stopping and Range of Ions in Matter
Language: en
Pages: 683
Authors: James F. Ziegler
Categories: Ion bombardment
Type: BOOK - Published: 2008 - Publisher: Lulu.com

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"This is a textbook the gives the background of the stopping and range of ions in matter (www.SRIM.org). It is written to be the prime resource for those who us
Ion-Solid Interactions
Language: en
Pages: 572
Authors: Michael Nastasi
Categories: Science
Type: BOOK - Published: 1996-03-29 - Publisher: Cambridge University Press

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Comprehensive guide to an important materials science technique for students and researchers.
The Stopping and Range of Ions in Solids
Language: en
Pages: 0
Authors: James F. Ziegler
Categories:
Type: BOOK - Published: 1985 - Publisher:

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Ion Implantation Science and Technology
Language: en
Pages: 649
Authors: J.F. Ziegler
Categories: Science
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier

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Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T