Theoretical Investigation of Homogeneous and Heterogeneous Reactions in the Chemical Vapor Deposition of Silicon from Silane
Author | : Donald L. Thompson |
Publisher | : |
Total Pages | : 10 |
Release | : 1987 |
ISBN-10 | : OCLC:227700519 |
ISBN-13 | : |
Rating | : 4/5 (19 Downloads) |
Download or read book Theoretical Investigation of Homogeneous and Heterogeneous Reactions in the Chemical Vapor Deposition of Silicon from Silane written by Donald L. Thompson and published by . This book was released on 1987 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report summarizes the computer equipment purchased on grant AFOSR-85-0115. The Scientific programs being supported by this equipment are described and finally a listing of all papers published since the acquisition of the computer is given. Keywords: Computers; Theoretical chemistry; Silicon.