Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249
Author | : J. W. Bartha |
Publisher | : |
Total Pages | : 366 |
Release | : 2010-10-05 |
ISBN-10 | : UIUC:30112085043559 |
ISBN-13 | : |
Rating | : 4/5 (59 Downloads) |
Download or read book Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249 written by J. W. Bartha and published by . This book was released on 2010-10-05 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.