Chemical Vapor Deposition of Group IVB, VB, and VIB Elements with Nonmetals

Chemical Vapor Deposition of Group IVB, VB, and VIB Elements with Nonmetals
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Publisher :
Total Pages : 40
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ISBN-10 : UOM:39015078517045
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Rating : 4/5 (45 Downloads)

Book Synopsis Chemical Vapor Deposition of Group IVB, VB, and VIB Elements with Nonmetals by : Hector O. McDonald

Download or read book Chemical Vapor Deposition of Group IVB, VB, and VIB Elements with Nonmetals written by Hector O. McDonald and published by . This book was released on 1983 with total page 40 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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In early 1987 I was attempting to develop a CVD-based tungsten process for Intel. At every step ofthe development, information that we were collecting had to be