Chemical Vapor Deposition of Silicon-germanium-carbon Films

Chemical Vapor Deposition of Silicon-germanium-carbon Films
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Publisher :
Total Pages : 294
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ISBN-10 : OCLC:40217498
ISBN-13 :
Rating : 4/5 (98 Downloads)

Book Synopsis Chemical Vapor Deposition of Silicon-germanium-carbon Films by : Pankaj Neelkanth Joshi

Download or read book Chemical Vapor Deposition of Silicon-germanium-carbon Films written by Pankaj Neelkanth Joshi and published by . This book was released on 1998 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at