Download or read book Computational Modeling in Semiconductor Processing written by M. Meyyappan and published by Artech House Publishers. This book was released on 1995 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.