Download or read book Fundamentals of Nanoscale Film Analysis written by Terry L. Alford and published by Springer Science & Business Media. This book was released on 2007-04-03 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.