Gettering and Defect Engineering in Semiconductor Technology XV
Author | : J.D. Murphy |
Publisher | : Trans Tech Publications Ltd |
Total Pages | : 513 |
Release | : 2013-10-07 |
ISBN-10 | : 9783038262053 |
ISBN-13 | : 3038262056 |
Rating | : 4/5 (53 Downloads) |
Download or read book Gettering and Defect Engineering in Semiconductor Technology XV written by J.D. Murphy and published by Trans Tech Publications Ltd. This book was released on 2013-10-07 with total page 513 pages. Available in PDF, EPUB and Kindle. Book excerpt: GADEST 2013 Selected, peer reviewed papers from the 15th Gettering and Defect Engineering in Semiconductor Technology (GADEST 2013), September 22-27, 2013, Oxford, UK