Handbook of Semiconductor Silicon Technology
Author | : William C. O'Mara |
Publisher | : William Andrew |
Total Pages | : 826 |
Release | : 1990-12-31 |
ISBN-10 | : UOM:39015018468192 |
ISBN-13 | : |
Rating | : 4/5 (92 Downloads) |
Download or read book Handbook of Semiconductor Silicon Technology written by William C. O'Mara and published by William Andrew. This book was released on 1990-12-31 with total page 826 pages. Available in PDF, EPUB and Kindle. Book excerpt: A summary of the science, technology, and manufacturing of semiconductor silicon materials. Properties of silicon are detailed, and a set of silicon binary phase diagrams is included. Other aspects such as materials handling, safety, impurity, and defect reduction are also discussed.