Download or read book Limited Reaction Processing for Semiconductor Device Fabrication written by James F. Gibbons and published by . This book was released on 1987 with total page 91 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new class of semiconductor processing equipment is shown to be feasible. Test equipment has been designed and fabricated which uses a combination of Rapid Thermal and Chemical Vapor Deposition (CVD) technologies to achieve epitaxial growth and deposition of semiconductors and insulators. The trend towards single wafer processing makes Limited Reaction Processing (LRP) particularly relevant to state of the art device fabrication research. Keywords: Rapid thermal processing, Semiconductor devices; Semiconductors; Insulators; Limited reaction processing; Chemical vapor deposition.