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MEMS Accelerometers
Language: en
Pages: 252
Authors: Mahmoud Rasras
Categories: Technology & Engineering
Type: BOOK - Published: 2019-05-27 - Publisher: MDPI

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Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technolog
MEMS Silicon Oscillating Accelerometers and Readout Circuits
Language: en
Pages: 312
Authors: Yong Ping Xu
Categories: Technology & Engineering
Type: BOOK - Published: 2022-09-01 - Publisher: CRC Press

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Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover
Microelectromechanical Systems
Language: en
Pages: 76
Authors: National Research Council
Categories: Technology & Engineering
Type: BOOK - Published: 1998-01-01 - Publisher: National Academies Press

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Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectiv
Inertial MEMS
Language: en
Pages: 497
Authors: Volker Kempe
Categories: Technology & Engineering
Type: BOOK - Published: 2011-02-17 - Publisher: Cambridge University Press

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A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to a
MEMS/NEMS Sensors
Language: en
Pages: 242
Authors: Goutam Koley
Categories: Technology & Engineering
Type: BOOK - Published: 2019-11-20 - Publisher: MDPI

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Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly e