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MEMS Reliability
Language: en
Pages: 300
Authors: Allyson L. Hartzell
Categories: Technology & Engineering
Type: BOOK - Published: 2010-11-02 - Publisher: Springer Science & Business Media

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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Com
Reliability Modeling of Microelectromechanical Systems Using Neural Networks
Language: en
Pages: 82
Authors: J. Sebastian Perera
Categories: Microelectromechanical systems
Type: BOOK - Published: 2000 - Publisher:

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Surface Engineering for MEMS Reliability
Language: en
Pages: 462
Authors: William Robert Ashurst
Categories:
Type: BOOK - Published: 2003 - Publisher:

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MEMS Reliability for Critical Applications
Language: en
Pages: 162
Authors: Russell A. Lawton
Categories: Technology & Engineering
Type: BOOK - Published: 2000 - Publisher: SPIE-International Society for Optical Engineering

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Materials and Failures in MEMS and NEMS
Language: en
Pages: 435
Authors: Atul Tiwari
Categories: Technology & Engineering
Type: BOOK - Published: 2015-09-11 - Publisher: John Wiley & Sons

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the