Mems Reliability
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Language: en
Pages: 300
Pages: 300
Type: BOOK - Published: 2010-11-02 - Publisher: Springer Science & Business Media
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Com
Language: en
Pages: 82
Pages: 82
Type: BOOK - Published: 2000 - Publisher:
Language: en
Pages: 462
Pages: 462
Type: BOOK - Published: 2003 - Publisher:
Language: en
Pages: 162
Pages: 162
Type: BOOK - Published: 2000 - Publisher: SPIE-International Society for Optical Engineering
Language: en
Pages: 435
Pages: 435
Type: BOOK - Published: 2015-09-11 - Publisher: John Wiley & Sons
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the