Download or read book Techniques for the Control of Integrated Circuit Quality and Reliability written by Erwin A. Herr and published by . This book was released on 1967 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of the test pattern concept, TEG, for in-process quality control and device reliability of integrated circuits was investigated during the fabrication and reliability testing phases of integrated circuit production. The Test Element Group (TEG), which was diffused on the wafer at the same time as the elements of the integrated circuit, proved to be a very successful vehicle for achieving the goals of this program. The TEG was made up of a number of selected elements in the integrated circuit diffusion pattern, metallized and connected for test evaluation as discrete components. The relationship was investigated between in-process variables of semi-conductor fabrication, pre-stress characteristics of TEGS and integrated circuits and the post-stress characteristics of TEGS and integrated circuits. The basic purpose of this program has been met.