Download or read book Theoretical Studies of Heterogeneous Reactions in Silicon CVD (Silicon Vapor Deposition) Catalysis written by Lionel M. Raff and published by . This book was released on 1988 with total page 33 pages. Available in PDF, EPUB and Kindle. Book excerpt: The results of a theoretical/computational research program to develop new methods and to investigate the chemical dynamics of various elementary homogeneous and heterogeneous processes occurring in the chemical vapor deposition of silicon form silane are described. The types of elementary processes we have studied include: Unimolecular dissociation of isolated gas-phase molecules and radicals, silicon clustering, gas-surface scattering, chemisorption, processes, diffusion on silicon surfaces, bimolecular gas-phase reactions, and tunneling in H-atom diffusion on silicon surfaces. Much of the research was done using standard classical trajectory methods. Monte Carlo variational phase-space and transition-state theories, which were developed in this research program were used to study processes that occur on long timescales. Silicon, Chemical vapor deposition, Silane solar cells. (JES).